Comparison of the structural properties of silicon carbide using very high frequency plasma enhanced chemical vapour deposition with magnetron sputtering techniques

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Bibliographic Details
Main Author:	Muhamad Muizzudin Azali
Other Authors:	Abd Khamim Ismail, supervisor
Format:	Master's thesis
Language:	English
Published:	Universiti Teknologi Malaysia 2025
Subjects:	Science
Online Access:	https://utmik.utm.my/handle/123456789/43377
Abstract	Abstract here

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