Comparison of the structural properties of silicon carbide using very high frequency plasma enhanced chemical vapour deposition with magnetron sputtering techniques

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Détails bibliographiques
Auteur principal:	Muhamad Muizzudin Azali
Format:	Dissertation
Langue:	anglais
Publié:	Universiti Teknologi Malaysia 2025
Sujets:	Science
Accès en ligne:	https://utmik.utm.my/handle/123456789/43377
Abstract	Abstract here

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