Comparison of the structural properties of silicon carbide using very high frequency plasma enhanced chemical vapour deposition with magnetron sputtering techniques

Also available in printed version

Bibliographic Details
Main Author:	Muhamad Muizzudin Azali
Format:	Dissertation
Language:	English
Published:	Universiti Teknologi Malaysia 2025
Subjects:	Science
Online Access:	https://utmik.utm.my/handle/123456789/43377
Abstract	Abstract here

Internet