Azali, M. M., & Abd Khamim Ismail, s. (2025). Comparison of the structural properties of silicon carbide using very high frequency plasma enhanced chemical vapour deposition with magnetron sputtering techniques. Universiti Teknologi Malaysia.
Chicago Style (17th ed.) CitationAzali, Muhamad Muizzudin, and supervisor Abd Khamim Ismail. Comparison of the Structural Properties of Silicon Carbide Using Very High Frequency Plasma Enhanced Chemical Vapour Deposition with Magnetron Sputtering Techniques. Universiti Teknologi Malaysia, 2025.
MLA (9th ed.) CitationAzali, Muhamad Muizzudin, and supervisor Abd Khamim Ismail. Comparison of the Structural Properties of Silicon Carbide Using Very High Frequency Plasma Enhanced Chemical Vapour Deposition with Magnetron Sputtering Techniques. Universiti Teknologi Malaysia, 2025.
