Formation of silicon nanowires by chemical vapour deposition technique using indium catalyst / Chong Su Kong
Formations of silicon nanowires using aurum and indium catalyst by plasma-enhanced chemical vapour deposition and hot-wire chemical vapour deposition techniques were studied in this work. The depositions were carried out by using a home-built dual-mode plasma-assisted hot-wire chemical vapour dep...
| 主要作者: | |
|---|---|
| 格式: | Thesis |
| 出版: |
2012
|
| 主题: |