The formulation of a transfer learning pipeline for the classification of the wafer defects

In a semiconductor manufacturing process, a semiconductor wafer may have defects which are unacceptable due to its complexity in manufacturing process. Defect detection in wafer is vital in avoiding yield loss in end product, which is often achieved by visual judgement using an optical microscope. T...

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Auteur principal: Lim, Shi Xuen
Format: Thèse
Langue:anglais
Publié: 2023
Sujets:
Accès en ligne:http://umpir.ump.edu.my/id/eprint/42467/1/ir.The%20formulation%20of%20a%20transfer%20learning%20pipeline%20for%20the%20classification%20of%20the%20wafer%20defects.pdf